MEMS based filter and catalizer

ABSTRACT

The present invention provides a filter for separating particles and/or catalyzer for particle reaction in a fluid. The device comprising array of passageways fabricated on a die wherein the passageway size is controlled by actuators. The passageway size is monitored and the actuators controlling the passageway size are activated conditionally upon the passageway size monitoring. Using movable actuators the passageway can achieve passageway size that is less then the fabrication minimal resolution. Proper locating, setting and/or activation of the actuators create passageways that can perform filtration of particles, trapping of particles and catalyzing particles reaction.

FIELD AND BACKGROUND OF THE INVENTION

The present invention, in some embodiments thereof, relates to particlesfiltration and catalysis and, more particularly, but not exclusively, tofilters and catalyzers fabricated on a die.

Particles filters are components that separate particles in a fluidcontaining a mixture of particles. Particle can be as tinny as a singlemolecule with angstrom scale size thorough a bigger chain molecule likea protein in a nanometer scale size to a biological cell or organism ormineral grains such as dust with sizes range from micrometers tomillimeters.

Filtration has many and varied applications, for example, filtration isused to clean the air in a clean rooms in the semiconductor industry.Filtration is also used in biological and medical application, forexample, filtration of blood to analyze the contents of specificparticles in it.

Catalysis is the act of promoting a chemical reaction between molecules.Generally speaking, the reaction can be combining two molecules to oneor breaking a molecule into two smaller molecules. Complex reactions,like breaking the molecule to more then two products or transforming apair of molecules to different pairs are also possible chemical reactionthat can be catalyzed by a catalyzer.

SUMMARY OF THE INVENTION

The present invention, in some embodiments thereof, relates to particlesfiltration and catalysis fabricated on a die. The method comprisesvariable size passageways. The passageways are fabricated on a die by aknown semiconductor fabrication process, such as photolithography andetching. The passageway size is controlled using actuators. Theactuators are MEMS actuators that moves relative to the passageways andfabricated on the same die. The passageway size can be made as small asdesired and even become fully closed. Optionally, the actuators areactivated using close loop control circuits that have feedback frommeasuring the actual passageway size. A passageway size as low as fewangstroms can be reached. Such resolution provides ability of filtrationof fundamental molecules.

According to an aspect of some embodiments of the present inventionthere is provided a filter for separating particles in a fluidcomprising array of passageways fabricated on a die wherein thepassageway size is controlled by actuators.

According to some embodiments of the invention, the passageway size ismonitored and the actuators controlling the passageway size areactivated conditionally upon the passageway size monitoring.

According to some embodiments of the invention, the monitoring is donebased on the capacitance measurement between pairs of the passagewaywalls or on the leakage current measurement between pairs of thepassageway walls or on the amount of light or any electromagnetic signalwith different wavelength that pass thorough the passageway or on anyother measurable physical property that change its value with passagewaysize.

According to some embodiments of the invention, the combination betweenthe actuators and the passageway are one or more of the actuators arecontrolling single passageway or a single actuator, alone or togetherwith other actuators, shared plurality of passageways or any other manyactuators to many passageways combinations.

According to some embodiments of the invention, actuators are MEMSactuators based on electrostatic, electromagnetic or piezoelectricforces.

According to some embodiments of the invention, the die is multilayerdie and the layers are fabricated using at least one of evaporation,photolithography and etching.

According to some embodiments of the invention, the passageways arefabricated in one or more layers of the die plane or fabricated acrossall layers perpendicular to the die plane.

According to some embodiments of the invention, the filter comprises atleast one of clog prevention subsystem, particles alignment subsystem,particle orientation subsystem, catalysis subsystem, inlets and outletsports or any other pre filtration or post filtration processingsubsystem.

According to some embodiments of the invention, the filter comprises prefiltration particle alignment subsystem and/or particle orientationsubsystem using the mean of any combination of (1) electric field, (2)magnetic field, and (3) mechanical structures or forces.

According to an aspect of some embodiments of the present inventionthere is provided a catalyzer of reactions of particles in a fluidcomprising array of passageways fabricated on a die wherein thepassageway size is controlled by actuators and wherein the passagewaysare used for any combination of (1) filtering particles, (2) trappingparticles, and/or (3) catalyzing particles reaction.

According to some embodiments of the invention, the trapping particlesby the passageways is performed by setting the passageway size to enableonly partial entry of a target particle to the passageway or performedby reducing the passageway size when a particle is inside thepassageway.

According to some embodiments of the invention, the passageway size ismonitored and the actuators controlling the passageway size areactivated conditionally upon the passageway size monitoring.

According to some embodiments of the invention, the monitoring is donebased on capacitance measurement between pairs of the passageway wallsor on the leakage current measurement between pairs of the passagewaywalls or on the amount of light or any electromagnetic signal withdifferent wavelength that pass thorough the passageway or on any othermeasurable physical property that change its value with passageway size.

According to some embodiments of the invention, the array of passagewaysis partitioned to groups wherein each group is acting in any given timeas filter, traps, or catalyzer and the combination between the actuatorsand the group of passageway are one or more of the actuators arecontrolling single passageway or a single actuator, alone or togetherwith other actuators, shared plurality of passageways or any other manyactuators to many passageways combinations.

According to some embodiments of the invention, the actuators are MEMSactuators based on electrostatic, electromagnetic or piezoelectricforces.

According to some embodiments of the invention, the die is multilayerdie and the layers are fabricated using at least one of evaporation,photolithography and etching.

According to some embodiments of the invention, the passageways arefabricated in one or more layers in the die plane or fabricated acrossall layers perpendicular to the die plane.

According to some embodiments of the invention, the catalyzer comprisesat least one of clog prevention subsystem, particles alignmentsubsystem, particle orientation subsystem, particle energy insertionsubsystem, reagent insertion subsystem, inlets and outlets ports or anyother pre filtering or post filtration processing subsystem.

According to some embodiments of the invention, the particle energyinsertion subsystem supply energy to the particles wherein the energysupplied at least in the form of kinetic energy, electric energy,magnetic energy, electromagnetic energy, heat energy or a combination ofthese.

According to some embodiments of the invention, a group of the actuatorsis delivering the kinetic energy to the trapped particles.

According to some embodiments of the invention, the catalyzer comprisesparticles detectors located in the passageways or adjacent to thepassageways inlet or outlet.

According to an aspect of some embodiments of the present inventionthere is provided a method for processing of particles in a fluidcomprising:

(a) providing array of passageways fabricated on a die wherein thepassageway size is controlled by actuators;

(b) setting the actuators to create passageways that perform anycombination of (1) filtering particles, (2) trapping particles, and/or(3) catalyzing particles reaction; and

(c) stream the fluid through the passageways.

According to some embodiments of the invention, the array of passagewaysis partitioned to groups wherein each group is acting in any given timeas filter, traps, or catalyzer and the combination between the actuatorsand the group of passageway are one or more of the actuators arecontrolling single passageway or a single actuator, alone or togetherwith other actuators, shared plurality of passageways or any other manyactuators to many passageways combinations.

According to some embodiments of the invention, the processing comprisesat least one of filtration of particles, sorting of particles, catalysisof particle reactions, clog prevention, particles alignment, particleorientation, energy insertion to particles, reagent insertion, inletsand outlets of fluids or any other fluid processing, wherein theprocessing is performed using dynamically activating different groups ofactuators in time.

According to some embodiments of the invention, the passageway size ismonitored and the actuators controlling the passageway size areactivated conditionally upon the passageway size monitoring.

According to some embodiments of the invention, the passageway size isset by the actuators to be less then the die minimal fabricationresolution.

According to some embodiments of the invention, the processing ismultistage processing and the processing is performed using multiplearrays of passageway fabricated on the same die and the fluid flowbetween stages of passageway processing.

Unless otherwise defined, all technical and/or scientific terms usedherein have the same meaning as commonly understood by one of ordinaryskill in the art to which the invention pertains. Although methods andmaterials similar or equivalent to those described herein can be used inthe practice or testing of embodiments of the invention, exemplarymethods and/or materials are described below. In case of conflict, thepatent specification, including definitions, will control. In addition,the materials, methods, and examples are illustrative only and are notintended to be necessarily limiting.

Implementation of the method and/or system of embodiments of theinvention can involve performing or completing selected tasks manually,automatically, or a combination thereof. Moreover, according to actualinstrumentation and equipment of embodiments of the method and/or systemof the invention, several selected tasks could be implemented byhardware, by software or by firmware or by a combination thereof usingan operating system.

For example, hardware for performing selected tasks according toembodiments of the invention could be implemented as a chip or acircuit. As software, selected tasks according to embodiments of theinvention could be implemented as a plurality of software instructionsbeing executed by a computer using any suitable operating system. In anexemplary embodiment of the invention, one or more tasks according toexemplary embodiments of method and/or system as described herein areperformed by a data processor, such as a computing platform forexecuting a plurality of instructions. Optionally, the data processorincludes a volatile memory for storing instructions and/or data and/or anon-volatile storage, for example, a magnetic hard-disk and/or removablemedia, for storing instructions and/or data. Optionally, a networkconnection is provided as well. A display and/or a user input devicesuch as a keyboard or mouse are optionally provided as well.

BRIEF DESCRIPTION OF THE DRAWINGS

Some embodiments of the invention are herein described, by way ofexample only, with reference to the accompanying drawings. With specificreference now to the drawings in detail, it is stressed that theparticulars shown are by way of example and for purposes of illustrativediscussion of embodiments of the invention. In this regard, thedescription taken with the drawings makes apparent to those skilled inthe art how embodiments of the invention may be practiced.

In the drawings:

FIG. 1 is a conceptual block diagram of a filter in accordance with thecurrent invention;

FIG. 2 is a conceptual block diagram of a single passageway element of apassageway array in accordance with the current invention;

FIG. 3a is a top view of a die in accordance with an exemplary of inplane filter embodiment of the current invention;

FIG. 3b is a cross section of the die illustrated in FIG. 3 a;

FIG. 3c is an illustration of the actuators illustrated in FIG. 3a infully closed position;

FIG. 3d is an illustration of the actuators illustrated in FIG. 3a fullyopen position;

FIG. 4a is a top view of a die in accordance with an exemplary of out ofplane filter embodiment of the current invention;

FIG. 4b is a cross section of the die illustrated in FIG. 4 a;

FIG. 5 is a top view of a die in accordance with a single actuatorshared by all passageways exemplary embodiment of the invention;

FIG. 6a is a top view of a die in accordance with an exemplary of aclogging prevention mechanism embodiment of the invention;

FIG. 6b is a cross section of the die illustrated in FIG. 6 a;

FIG. 7 is a conceptual block diagram of a catalyzer in accordance withthe current invention;

FIG. 8 is a conceptual block diagram of another type of catalyzer inaccordance with the current invention;

FIG. 9a is a top view of a die in accordance with an exemplary of inplane catalyzer embodiment of the current invention;

FIG. 9b is a cross section of the die illustrated in FIG. 9 a;

FIG. 10a-10d are focused views of two stage passageway with catalyzingpassageway proceed trap passageway in accordance with an exemplary oftrap catalyzer embodiment of the current invention;

FIG. 10b is a view on the initial stage;

FIG. 10b is a view on the trapping stage;

FIG. 10c is a view on the catalysis stage;

FIG. 10d is a view on the initial stage;

FIG. 11a is a top view of a die in accordance with an exemplary of outof plane catalyzer embodiment of the current invention;

FIG. 11b is a cross section of the die illustrated in FIG. 11a ; and

FIG. 12 is a conceptual block diagram of a multi process fluidprocessing system in accordance with the current invention.

DESCRIPTION OF SPECIFIC EMBODIMENTS OF THE INVENTION

The present invention, in some embodiments thereof, relates to particlesfiltration and catalysis and, more particularly, but not exclusively, tofilters and catalyzers fabricated on a die.

As used herein, the term die means a flat multilayer surface fabricatedby processes used mainly in the semiconductor industry. Fabricationprocesses comprise but not limited to evaporation, photolithography,etching, vapor deposition, etc. The die materials comprises but notlimited to silicon, germanium, carbon, gallium arsenide or any othersemiconductor materials, polymers, metals such as gold, copper,aluminum, silver, ceramics material such as alumina, silicon dioxide,zinc oxide, oxides, Nitrides, carbides, yttrium barium copper oxide orany other material that can be used in die fabrication processes.

As used herein, the term particle is a molecule, a chain of molecules, abiological cell or organism, or mineral grains such as dust. Sizes ofparticle can be in the range from angstroms to millimeters. The particlehas some bonding connection between its ingredients and it can be rigidor flexible.

As used herein, the term fluid is a gas mixture, such as air, or aliquid mixture, such as blood or mineral water. The fluid mixture can bea solution or non soluble mixture.

The most popular filters in use today are filters that use porous orfibber based material. Such filters do not have precise particlepassageway size so they can only have rough filtration characteristics.Fixed passageway size filters are done by precise fabrication. Micro ornano fabricated filters fabricated by current semiconductor fabricationprocesses are known in the art, see for example U.S. Pat. No. 5,651,900entitled “Microfabricated Particle Filter”, by Keller et al. Someapplications have precise particle passageway size but the particlepassageway size is usually limited by the fabrication technology. Suchfilters are less flexible and need to be designed and manufacturedspecifically for each application which makes them more costly and lesspractical.

As used herein, the term passageway means a hallow volume that particleswith a limited size can pass through from one side to the other side ofthe passageway.

As used herein, the term passageway size means an indicator for themaximal size of particles that can pass the passageway. For example, fora passageway shape of circle or cylinder, the diameter fully describesthe passageway size. For rectangular shape passageway both length andwidth are needed. In general case, both the passageway and the particleare 3D objects and all dimensions of the particle and the passageway aswell as the orientations and elasticity of both passageway and particleaffect the actual size of the particle that can pass through thepassageway.

U.S. Pat. No. 6,838,056 entitled “Method and Apparatus for SortingBiological Cells with a MEMS Device”, by Foster teach a die based fluidprocessing using MEMS actuator but the actuators are used only as avalves that direct particles to flow between two possible passageways.The current invention is using actuators to control passageway size, totrap particles in passageway and to transfer kinetic energy intoparticles to promote reaction, i.e. to catalysis.

In an exemplary embodiment of the invention, a new flexible andaccurate, filtration method and device are provided. The inventionprovides many new ways, abilities and applications in fluid filtration.The filtration method comprises variable size passageways. Thepassageways are fabricated on a die by a known semiconductor fabricationprocess, such as photolithography and etching. The passageway size iscontrolled using actuators. The actuators are MEMS actuators that movesrelative to the passageways and fabricated on the same die. This methodenables the creation of passageways sizes that are much smaller then thefabrication process capabilities. The passageway size can be made assmall as desired and even become fully closed, i.e., blocking allparticles. The smallest size resolution is depend on the accuracy ofcontrol of the actuators. Optionally, the actuators are activated usingclose loop control circuits that measure the actual passageway size.Passageway size may be measured by capacitance measurement on the actualgap between passageway walls. Leakage current or light intensity or anyother physical property that is varied in accordance with the passagewaysize may be used. A passageway size as low as few angstroms can bereached. Such resolution provides ability of filtration of fundamentalmolecules.

As used herein, the term actuator means an element that is able to moverelative to the die upon instruction. Common actuators, also known asMEMS actuators, are electrostatic, e.g., comb actuator, electromagnetic,piezoelectric and thermal. The move instruction is usually an electricsignal such as voltage or current.

In an exemplary embodiment of the invention, a pre filter orientationprocess/element/subsystem is implemented. Such element enables accuratefiltration of non symmetric particles/molecules. In an exemplaryembodiment of the invention, a clogging preventionprocess/element/subsystem is implemented. Clogging prevention preventsclogging particles to block the filter or alternatively evacuateblocking particles from the filter.

In an exemplary embodiment of the invention, the passageway size isprogrammable and changed during filter operation to provide filtrationof different particles with the same filter in different times, or torelease clogging in specific stage on time or to switch on and off thefiltration.

Before explaining at least one embodiment of the invention in detail, itis to be understood that the invention is not necessarily limited in itsapplication to the details of construction and the arrangement of theelements and components and/or methods set forth in the followingdescription and/or illustrated in the drawings and/or the Examples. Theinvention is capable of other embodiments or of being practiced orcarried out in various ways.

Referring now to the drawings, FIG. 1 illustrates a conceptual blockdiagram of the filter in accordance with the current invention. The coreof filter 10 is array of passageways 100. The conceptual block diagramof each passageway element is provided in FIG. 2. The fluid enters anoptional alignment and orientation chamber 300 that is provided to alignand orient the particles to be filtered. At the inlet of passagewayarray 100 an optional clogging prevention and leftover outlet subsystem400 is provided. The particles that are too big to go through the filterpassageways are drained to the leftover outlet. The fluid and theparticles that pass through passageway array 100 are further processedby optional post filter processing subsystem 500 and then flow out ofthe filter.

Reference is made now to FIG. 2. FIG. 2 illustrates a conceptual blockdiagram of a single passageway element 105 of passageway array 100 inaccordance with the current invention. Passageway 101 is a hallow volumelimited by movable walls 110. Walls 110 are connected to actuators 120.Driver 230 drives actuators 120. Passageway walls 110 comprise sensors130 that are connected to measurement unit 210. Measurement unit 210measure the gap size of passageway 101. The measurements frommeasurement unit 210 are provided to controller 220 that instruct driver230 to drive actuators 120 that moves passageway walls 110. Controller220 controls the passageway according to the requirements of the system.Optionally, controller 220 uses a close loop control scheme with realtime feedback from measurement unit 210 to maintain an accuratepassageway size.

Reference is made now to FIGS. 3a-3d . FIGS. 3a-3d illustrate asimplified exemplary embodiment of the invention with an actual elementsfabricated on a die. The fluid flow in this case is parallel to thesurface of the die. Such arrangements are referred hereinafter as “inplane” implementation. In other embodiments of the invention the fluidflow is perpendicular to the plane of the die. Such implementations arereferred as “out of plane” implementations.

Reference is made now to FIG. 3a . In FIG. 3a , a top view of the die isillustrated. The fluid to be filtered flows from top of die 12 to thebottom of die 12. First, the fluid passes an alignment chamber 310.Additionally or alternatively, particles/molecules are aligned andorientate by electric or magnetic fields. For example if targetmolecules have electric or magnetic dipoles applying a field in theproper direction will rotate the molecule to a desired orientation.Next, the fluid passes through array of controllable passageways 100 a.For illustration clarity, only three passageways 101 a are illustratedin the figure. Typically, hundreds to thousands passageways will bemanufactured on a single die. Passageways 101 a width is controlled byactuators 120 a that move the passageway edges inwards and outwards. Theactuators shown in the figure are electrostatic comb actuators.Additionally or alternatively, other types of actuators such as magneticor piezoelectric can be used.

FIG. 3b illustrates a cross section of die 12 across line AA illustratedin FIG. 3a . Die 12 contains five major layers. The bottom layer issubstrate 70 a. Silicon substrate is preferred but other substrate maybe used. Above the substrate, a control layer 72 a is fabricated. Thecontrol layer may comprise several sub layers. The control layercomprises connecting conductors to the actuators 282. Optionally, thecontrol layer contains connecting conductors to the passageway sensors284. Passageway 101 a width is monitored by measurement of thecapacitance between the two sides of the passageway edges. Thecapacitance is inversely proportional to the distance of the passagewaywidth, so when the width is small the capacitance increasesignificantly. This fact allows achieving a very good resolution inmeasurement small gaps and accurate control of the passageway width invery small sized is achieved. Optionally, to enable accurate measurementof the capacitance, an insulator 286 are inserted between the comb partof the actuator and the passageway walls.

Optionally, control layer 72 a implements the full control system of thefilter and comprises actuator drivers and measurement means includingtransistors, digital and analogue circuits all implemented inside layer72 a.

The third layer is fluid bottom plane 74 a. This surface is preferablymade of SiO₂ or any other chemically non reactive compound. Layer 74 ais used as the floor of passageways 101 a and also contains conductivepass through, i.e., vias, for driving the actuators and measuring thepassageway width.

The fourth layer 76 a contains the actuator and the passagewaysstructure as illustrated by the top view of FIG. 3a . Each passageways101 a surrounded be two actuators and the passageways 101 a width, thegap, become wider when actuator pull the passageways 101 a edgesoutwards and become narrower when the actuators push the passageways 101a edges inwards. The top layer 78 a closes the filter passageways fromthe top side. Layer 78 a acts as the ceiling of the passageway andcaptures the fluid inside the filter cavity.

FIG. 3c and FIG. 3d illustrate the actuators 120 a and passageways 101 ain fully closed and fully open positions respectively.

The previous exemplary embodiments of FIG. 3a -FIG. 3d implements inplane filter with one dimensional array of passageways. Next, aperpendicular to plane two dimensional passageway array embodiments isillustrated.

Reference is made now to FIG. 4a . FIG. 4a illustrates a top view of thedie. The fluid to be filtered flows from top of die to the bottom of dieperpendicular to the die plane. Die 12 contains a 2D array ofpassageways 101 b. Passageways 101 b are fabricated by performing poresthrough all layers of the die, e.g., by using etching fabricationtechniques. The passageway passes through die 12. Each passageway 101 bis surrounded by two actuators 120 b. Each actuators 120 b pair act as asliding door that can partially or fully block passageway 101 b. Forclarity the full detail of actuators 120 b implementation is not givenin the figure and they are denoted by rectangular. Electrostatic combactuator implementation similar to the one illustrated in FIG. 3a may beused. Other electrostatic actuators or any other actuator scheme can beused as well. Actuators 120 b are implemented in internal layer asillustrated next in FIG. 4b . Reference is made now to FIG. 4b . FIG. 4billustrates a cross section of die 12 across line BB illustrated in FIG.4a . Die 12 have four principle layers. Substrate layer 80 b is thebottom layer. On top of substrate 80 b a control layer 82 b isfabricated. As in previous embodiment control layer 82 b can be simpleconnection matrix to another component that performs the actual controland measurements or it can contain all electric circuits inside die 12.Note that control layer 82 b is not a full plane but a plane with pores.The existence of pores reduce the effective area of the layer but aslong as an elements, e.g., wires and transistors, are smaller then thearea between the pores any control circuit can be implemented on controllayer 82 b. On top of control layer 82 b an actuators layer 84 b isfabricated. The size reduction or blocking operation of actuators 120 bon passageway 101 b is clearly illustrated in this figure view.Actuators 120 b are move inside this layer to provide variable pore sizefrom fully close passageway to fully open passageway.

In an exemplary embodiment of the invention, three dimensional shapepassageways are fabricated using a stack of independent actuatorslayers.

In an exemplary embodiment of the invention, the number of actuators perpassageway is one. In an exemplary embodiment of the invention, thenumber of actuators per passageway is three or more. In an exemplaryembodiment of the invention, a single actuator is shared between severalpassageways.

In an exemplary embodiment of the invention, passageway cross section isfabricated as rectangle, ellipse or any other geometrical shape.

Reference is made now to FIG. 5. FIG. 5 illustrates an exemplaryembodiment of the invention, with a triangle passageway cross sectionand a single actuator shared by all passageways. Triangle passageways101 c are controlled by a single actuator 120 c that shared between allpassageways. When actuator 120 c is pulled to the top of the figure allpassageways are fully open and when actuator 120 c is pushed to thebottom all passageways are fully closed. In any actuator 120 c positionthe shape of the passage cross section is a triangle but the length ofthe triangle sides is different.

Clogging Prevention

One of the biggest problems in filtration is clogging. Clogging accursewhen a particle is too big to pass the passageway and stack in front ofthe passageway or inside the passageway. The less problematic problem iswhen the particle is larger the size of the passageway. In this case theparticle is stack in the passageway inlet and the passageway is blocked.Since the invention provides variable size passageways the filtercontroller can clean itself by applying “cleaning cycles”. In cleaningcycle the passageways are set to fully open state so the cloggingparticles that clog the passageways are swept out through thepassageway. Additionally or Alternatively, A clogging preventionmechanism is implemented to solve the problem of clogging during normaloperation and without applying cleaning cycles. Such clog preventionmechanism may eliminate the need to perform periodically cleaning cyclesor increase the time duration between cleaning cycles. An exemplaryembodiment of cleaning mechanism for perpendicular to the die planefilter is illustrated in FIGS. 6a and 6 b.

Reference is made now to FIG. 6a . FIG. 6a illustrates a top view of anexemplary embodiment of the invention with perpendicular to the dieplane filter and clogging prevention mechanism. Die 12 comprises thearray of passageway 101 d controlled by actuators 120 d similar to theembodiment of FIG. 4. In addition, cleaning passageways 401 forevacuating clogging particles are provided in the left and the rightedges of die 12. The pores of cleaning passageways 401 are wider thenthe filter passageways 101 d so all clogging particles pass throughcleaning passageways 401. A sliding cleaning bar 410 is sliding in aspecial clog cleaning layer located on top of the actuators layer,illustrated in FIG. 6b . Sliding cleaning bar 410 is sliding of the dieplane using step actuator sliders 420 located at the edges of die 12.Sliding cleaning bar 410 is continuously sliding from edge to edge ofdie 12, from left to right the back from right to left. When passingover passageways 101 d sliding cleaning bar 410 pushes the cloggingparticles away from the passageway inlet and when bar 410 reaching theedges, the clogging particles are exhausted to the cleaning passageways401.

Reference is made now to FIG. 6b . A cross section of die 12 across lineCC illustrated in FIG. 6a . The bottom layer is substrate 80 d. Abovethe substrate, a control layer 82 d is fabricated. The implementationdetails of control layer 82 d are similar to the control layer inprevious embodiments. In addition to controlling and driving actuators120 d, control layer 82 d optionally contains circuitry to control anddrive step actuator sliders 420. The third layer is actuators layer 84 dis similar to layer 84 b illustrated in FIG. 4b . Above actuators layer84 b, clean clogging layer 88 b is fabricated. This layer containscleaning bar 410 that slides over actuators 120 d. This layer alsocontains part of step actuator sliders 420 and the inlet to cleaningpassageways 401. Top layer 86 d covers the cavity of filter 12.

In an exemplary embodiment of the invention, similar mechanism forcleaning clogging particles is used in in-plane filter embodiment.

Catalyzing

Having a controlled size passageways build in a fabricated die, open thedoor for other manipulations on participles that can be done inconjunction with the fact that the particle is passing through thepassageway. Few angstroms passageway size enable catalyzing chemicalreactions as shown next. In the following exemplary embodiments of theinvention a new flexible and accurate catalysis schemes are provided.The catalyzer die is fabricated with particle/molecule filterpassageways or traps that change their size via MEMS actuators that moverelative to the die in similar fashion to what have been disclosedbefore.

As used herein, the term trap means a passageway that is designed andset to capture a particle/molecule in specific place for a specifiedduration.

As used herein, the term catalyzer is a device that performs the act ofpromoting a reaction between particles. The reaction can be a chemicalreaction of combining two molecules to one, breaking a molecule into twosmaller molecules or complex chemical reactions, such as, reactioninvolving more then two reactants or products. In addition, the termcatalyzer is used herein to describe a device that performs the act ofpromoting breaking or combining particles that are not a plain moleculesand the break or combine of those particle are not usually classified asa chemical reaction per se.

Reference is made now to FIG. 7. FIG. 7 illustrates a conceptual blockdiagram of the catalyzer in accordance with the current invention.catalyzer 20 comprises alignment & orientation chamber 300, cloggingprevention and leftover outlet subsystem 400 and filtration chamberusing passageway array 100 similar to the embodiment illustrated inFIG. 1. The particles/molecules that pass through the filter are thetarget particles/molecules for reaction. The filtered, i.e., targetparticles/molecules pass to catalyzing chamber 600. Additionally oralternatively, catalyzing chamber 600 is overlapping the filtrationpassageway and the catalysis occurs during the particle pass through thepassageway. The reaction can be either a break of the particle/moleculeor combine with other particle molecule. In the case of combine reactionother reagents are needed to participate and optionally those reagentsare inserted to the canalization chamber using reagents insertionsubsystem 700. The reaction can be a combination of both break andcombine reactions. To catalyze the reaction some energy need to besupplied. The energy to promote the reaction is supplied by energyinsertion subsystem 800. The energy to promote the reaction can bemechanical/kinetic energy, electromagnetic energy, e.g., RF/IR/light/UV,electric or magnetic energy. It is well known that for some chemicalreaction a very specific amount of energy is needed with the rightmomentum and in the right time. Using the current invention the place ofreaction is well defined since the particles is going through thepassageways. In an exemplary embodiment of the invention, energyinsertion subsystem 800 comprises MEMS actuator to insert kinetic energyto the particles. Additionally or alternatively a heater element orpiezoelectric element is inserted in the passageway.

In an exemplary embodiment of the invention, energy insertion subsystem800 comprises electromagnetic source radiated to passageway orpassageway inlet or passageway outlet. Electromagnetic source comprisesLEDs, Lasers, VCSELs, Antenna elements or any other EM emitting devices.

In an exemplary embodiment of the invention, energy insertion subsystem800 comprises a source of electric or magnetic field induced to thepassageway or passageway inlet or passageway outlet. The electric ormagnetic fields are designed to transfer energy to the target particles.

Optionally, to achieve, when needed, the accurate time to supply theenergy, detectors 880 are integrated in catalyzer 20 to detect when aparticle is passing through the passageway. The detection can be basedon same capacitance measurement of the passageway gap that change whenparticle is on the gap, or detection of the electromagnetic wave thatpass through the passageway (the particle may absorb some of the light),or sensing the particle mass using a sensitive cantilever deployed inthe passageway, or any other mean that can sense the existence andoptionally the type of the particle in the passageway.

In an exemplary embodiment of the invention, kinetic energy is suppliedby energy insertion subsystem 800 using MEMS actuators in a similarfashion as it is used to perform the passageway. Additionally oralternatively, the mechanical energy insertion is performed with thesane actuator used for filtration, so a single actuator performs bothpassageway sizing and kinetic energy transfer operations.

Reference is made now to FIG. 8. Catalyzer 20 comprises alignment &orientation chamber 300 and clogging prevention and leftover outletsubsystem 400 similar to the embodiment illustrated in FIG. 1. The samemechanism of the movable actuator passageways is be easily transformedto a trap mechanism. If the passageway opening is set to a size that isslightly smaller then the target particle, the particle can trap on thepassageway inlet. Alternatively, trapping can be performed by closingthe passageway when a particle is in the passageway. In an exemplaryembodiment of the invention, catalyzer 20 comprises trapping array 900.The movable actuators in the trap enable the trap to be used multipletimes be opening the trap and releasing the trapped particle and thenset again the trap by close the trap again. The MEMS actuators allowtrap size to reach sub nano-meter sizes even sizes down to few atomsmolecules size, is possible. Using MEMS actuator, catalyzing chemicalreaction of any small size molecule is possible. When the particle isholed by the trap the catalysis process can be performed. Driving thetrap actuator is done using close loop control as demonstratedpreviously and illustrated in FIG. 2. Catalyzer 20 comprises catalyzingchamber 600 in front to the trapping array 900. The particles thattrapped are catalyzed one that chamber. To promote the reaction reagentsinsertion subsystem 700 and energy insertion subsystem 800 are provided.Additionally or alternatively, catalyzing chamber 600 is overlapping thetrap and the catalysis occurs during the particle is in the trap.Additionally or alternatively, catalyzing chamber 600 is locatedadjacent to the trap outlet and the catalysis occurs when the particleexit the trap. Catalyzer 20 comprises detectors 880 to detect when aparticle is trapped or passing through the trap/passageways.

All options describe above for implementation of energy insertionsubsystem 800 and detectors 880 are possible in this embodiment as well.

The implementation of all components in a single a die enablesintegration of several steps of filtration, reagent delivery andreactions to provide complex chemical system capabilities.

The following examples illustrate exemplary simplified embodiments ofthe catalyzer invention and demonstrate the actual elements fabricatedon a die using semiconductor fabrication methods. The fluid flow as inthe filter case is either in plane implementation or out of plane, i.e.,perpendicular to the plane of the die.

FIGS. 9a-9b illustrate an exemplary simplified embodiment of thecatalyzer invention with an actual elements fabricated on asemiconductor die. The fluid flow in this embodiment is in plane.

Reference is made now to FIG. 9a . In FIG. 9a , a top view of the die isillustrated. The fluid flows from top to bottom. First, the fluid passesan alignment chamber 310. Afterwards, the fluid pass through orientationchamber 320 that rotate molecule with electric dipole in accordance withthe electric fields. For example if target molecules have electric ormagnetic dipoles applying a field in the proper direction will rotatethe molecule to the desired orientation to pass through threepassageways. Orientation chamber 320 contains rods 322 that are chargedwith positive and negative charges. Next, the fluid passes through arrayof controllable passageways 100 e. The passageways are similar to thepassageways that were demonstrated in FIG. 3a . For clarity, only threepassageways 101 e are illustrated in the figure. Typically, hundreds tothousands passageways will be manufactured on a single die. Filtrationpassageways 101 e width is controlled by actuators 120 e that move thepassageway edges inwards and outwards. The actuators shown in the figureare electrostatic comb actuators. Additionally or alternatively, othertypes of actuators such as magnetic or piezoelectric can be used. Theparticles that pass the filtration of passageways 100 e go through asecond array of passageways, catalyzing passageways array 600 e.Catalyzing passageways 601 e are controlled by the catalyzing actuators620 e. Catalyzing actuators 620 e are vibrating in specified frequencyin order to provide the molecule that passes through the passageway akinetic energy with the right momentum to excite electrons in themolecule to higher energy levels. Additionally or alternatively, theprovided kinetic energy breaks the molecule to two or more smallermolecule. Optionally, Detectors 882 are located between filtrationpassageways 101 e and catalyzing passageways 601 e. The detector cansense the existence of a particle exiting filtration passageways 101 eand entering catalyzing passageways 601 e and trigger the catalyzingactuators 620 e. To complete the reaction in this exemplary embodimentof the invention, reagent inlets 710 are located in the outlets ofcatalyzing passageways 601 e. The inserted reagent come to contact withthe energy excited reactant that pass thorough both filtrationpassageway 101 e and catalyzing passageway 601 e and since the reagentis properly energy excited the desired reaction is performed with highprobability. Additionally or alternatively, the unstable molecules thatwere created during the passing through the catalyzing passageways 601 eare combined with the inserted reactants.

FIG. 9b illustrates a cross section of die 22 across line CC illustratedin FIG. 9a . Similar to the embodiment of FIG. 3b , die 22 contains fivemajor layers. The bottom layer is substrate 70 e, control layer 72 e,fluid bottom plane layer 74 e, passageway and actuators layer 76 e andtop layer 78 e are fabricated. Control layer 76 e may comprise severalsub layers. The control layer comprises connecting conductors to theactuators 282. Optionally, the control layer contains connectingconductors 284 to the passageway sensors and/or to the detectors 882.

Control layer 72 e, optionally, implement the catalyzer control systemand comprises actuator drivers and measurement means includingtransistors, digital and analogue circuits implemented all implementedinside layer 72 e.

Fluid bottom plane layer 74 e is preferably made of SiO₂ and used as thefloor of passageways 101 e and 601 e.

Passageway and actuators layer 76 e contains both the actuators and thepassageways structure as illustrated by the top view of FIG. 9 a.

The top layer 78 e closes the filter passageways from the top side.Layer 78 e acts as the ceiling of the passageways and captures the fluidinside the catalyzer cavity.

Reference is now made to FIG. 10a -FIG. 10d . FIG. 10 a-FIG. 10d arefocusing illustrations on a single two stage passageway with catalyzingpassageway adjacent to trap passageway. In the figures, catalyzingactuators 620 f is located before (in relation to the fluid flow) thetrap actuators 920 f. Reference is now made to FIG. 10a . In the figure,molecule 650 is approaching the trap. The trap is set so that trapactuators 920 f are partially close to allow the head of the moleculeenter the trap, while catalyzing actuators 620 f are open to allow themolecule body approach the trap. The orientation of the molecule isoptionally rotated to the desired orientation using an orientationchamber (not shown in the figure). Reference is now made to FIG. 10b .In FIG. 10b molecule 650 is hold in position by the trap. In FIG. 10ccatalyzing actuators 620 f close transfer to the molecule body a kineticenergy to promote a chemical reaction. And finally in FIG. 10d trapactuators 920 f opens and release the molecule. Since the moleculeabsorbs the kinetic energy from the catalyzing actuators 620 f themolecule breaks down to three product molecules 650 a, 650 b and 650 c.

In an exemplary embodiment of the invention, the actual shape of theedges of catalyzing actuators 620 f and trap actuators 920 f can beshaped to match the 3D shape of the target molecule.

FIGS. 11a-11b illustrate an exemplary simplified embodiment of thecatalyzer invention fabricated on a semiconductor die with aperpendicular to die plane implementation.

Reference is made now to FIG. 11a . In FIG. 11a , a top view of the dieis illustrated. Similar to the exemplary implementation in FIG. 4, thefluid flows from top of die to the bottom of die perpendicular to thedie plane. Die 22 contains a 2D array of passageways 101 g. Passageways101 g are fabricated by performing pores through all layers of the die,e.g., by using etching fabrication techniques. The passageway passesthrough die 12. Each passageway 201 is surrounded by four actuators, twocatalyzing actuators 620 g and trap actuators 920 g (only top twocatalyzing actuators 620 g are shown in the top view figure). Theactuators are organized in two layers: catalyzing layer and trappinglayer. Each layer contains a pair of actuator per passageway 101 g andeach pair can block passageway 101 g when the actuators are in closeposition.

Reference is made now to FIG. 11b . FIG. 3b illustrates a cross sectionof die 22 across line DD illustrated in FIG. 11a . Die 22 contains sixmajor layers. The bottom layer is substrate 80 g. Silicon substrate ispreferred but other substrate may be used. Above the substrate, acontrol layer 82 g is fabricated. The details of control layer 82 g issimilar to control layers 82 b and control layer 82 d in FIG. 4b andFIG. 6b respectively. The third layer is trapping actuators layer 84 g.The actuators in this layer generate the traps. For each passageway 101g two trap actuators 920 g are located in this layer. The forth layer isa separation layer 88 g that separates between the two actuators layers.The fifth layer is catalyzing actuators layer 94 g. For each passageway101 g two catalyzing actuators 620 g are located in this layer. The lastlayer is top layer 86 g that protects and holds the sliding actuatorsand provides passageways 101 g inlets. The operation of the catalyzerdie 22 is similar to the one illustrated in FIG. 10. First the trapactuators 920 g are set and a particle is being trapped. Then,catalyzing actuators 620 g provide a kinetic energy and optionally othertype of energy (not shown in the figure) to the particle. Finally bothtrap actuators 920 g and catalyzing actuators 620 g release the particleand the reaction is performed. Optionally (not shown in the figure)additional energy as well as other reagent are supplied in passageways101 g outlet to complete the reaction.

In an exemplary embodiment of the invention, a LED or Laser, e.g., VCSELare integrated in the die inside the passageways or inside catalyzingchambers. The LED or Laser emits light to be absorbed by the reactantand effectively promote the desired reaction.

In an exemplary embodiment of the invention, pairs of light emitter suchas LED or Laser, e.g., VCSEL and a photo detector are integrated in thedie. The light emitting and light detecting pair are used to monitor theexistence of a desired particle in the passageways.

The reactions the catalyzer promotes in accordance to the invention arenot limited to chemical reaction pre se, rather apply also for break ordestroy biological partials, e.g., cells, to grain mineral particle, tobind particle etc.

In an exemplary embodiment of the invention, the number of catalyzingactuators or the number of trapping actuator per passageway can varyfrom one to many per single trap or passageway. In an exemplaryembodiment of the invention, a single trapping or catalyzing actuator isshared between several traps or passageways.

It is appreciated that features described in the embodiments, liketrapping, catalyzing, filtration, detection, cleaning, etc. may also beprovided in any combination in a single embodiment. Conversely, variousfeatures of the invention, which are, for brevity, described in thecontext of a single embodiment, may also be provided separately or inany suitable subcombination or as suitable in any other describedembodiment of the invention. Certain features described in the contextof various embodiments are not to be considered essential features ofthose embodiments, unless the embodiment is inoperative without thoseelements.

System Use Examples

The programmability and the versatility of the above described filtersor catalyzers can be used in a system where a single device can performdifferent tasks on time and several devices can work cooperativelyeither implemented together in the same die or in separate dies.

In an exemplary embodiment of the invention, a sequence of passagewayarrays and processing units/elements/subsystems are fabricated on thesame die. Several passageway arrays can be located adjacently to eachother. Several processing units/elements/subsystems can be locatedadjacently to each other as well.

Reference now made to FIG. 12. FIG. 12 illustrates a conceptual blockdiagram of a system containing several filters/catalyzers in a singledie. In an exemplary embodiment of the invention, the system die 30contains nine elements/subsystems, five processing elements 500 and fourpassageway array 100. Each processing stage might have inlet ports andoutlet ports of fluids. Some of those inlets and outlets may beconnected to each other either internally on the die or via an externalconnection. As can be seen two processing subsystem 500 (in stages 3 and4) are located in series and two passageway arrays 100 are located inseries as well. Three a more elements in series are possible. Forexample system die 30 may implement a blood processing system where thefirst processing stage is a clogging prevention subsystem that removesall blood cells and big organisms from the blood. Smaller particles flowthrough the second stage passageway array that set for size that is lessthen the smallest cell or organism in the blood. Third stage isalignment subsystem for electrical field and fourth stage is clogprevention subsystem for bigger molecules like proteins. Stage 5 and 6are a trap and a mechanical catalyzer for specific small target moleculein the blood. Stage 7 can inject back the cells that were removed instage 1. The fluid, with the exited or braked small molecule (andwithout the protein), pass thorough the passageway array in stage 8.Passageway array in stage 8 is used as a catalyzer and further promote areaction between the blood cells and the target molecules. In stage 9the protean are injected back so a closed system for blood processing isillustrated.

In an exemplary embodiment of the invention, particle sorting system isprovided using a filter embodiment. At initial state the fluid mixtureis provided to the filter when passageway is closed. Then thepassageways are gradually opens allow bigger and bigger particle to flowto the filter outlet. The filter outlet synchronously transfers theoutlet fluid to different destinations so particle sorting by size isaccomplished.

In an exemplary embodiment of the invention, a fluid containingbiological particle like blood, plasma or intercellular fluid isinserted to the device in accordance to the invention. The device canfirst filter the smaller molecule in the fluid then for any particlewith size greater then a threshold (set to detect biological particlelike cell, virus or bacteria) the device break the particle (a catalysisoperation that practically kills the vitality of the organism if it wasvital). Such a device can be a sterilizer and with proper setting andseveral passes of filtration and catalyzing, i.e., breaking, it may usedas a selective sterilizer, i.e., sterilizer that kill some organisms butkeep other organisms vital.

In an exemplary embodiment of the invention, inlet fluids are sorted andsome particle/molecule are brought together in adjacent passageway andtogether with catalyzing means create new substance in the fluid. In anexemplary embodiment of the invention, a device that takes blood andseparate from the blood the glucose from one hand and red blood cellfrom the other hand. The red blood cells are catalyzed to emit oxygenand then the glucose is promoted to react chemically with the oxygen toprovide water and carbon dioxide to the blood. Such a device is a closesystem, i.e. have only inlet and outlet of blood and the blood that comeout of the system have a reduce glucose level. Such a device can be usedin vivo in a blood vessel without any need for external reagent port orfor external waste port.

It is expected that during the life of a patent maturing from thisapplication many other relevant applications will be developed and thescope of the terms is intended to include all such new technologies apriori.

The terms “comprises”, “comprising”, “includes”, “including”, “having”and their conjugates mean “including but not limited to”.

As used herein, the singular form “a”, “an” and “the” include pluralreferences unless the context clearly dictates otherwise.

It is appreciated that certain features of the invention, which are, forclarity, described in the context of separate embodiments, may also beprovided in combination in a single embodiment. Conversely, variousfeatures of the invention, which are, for brevity, described in thecontext of a single embodiment, may also be provided separately or inany suitable subcombination or as suitable in any other describedembodiment of the invention. Certain features described in the contextof various embodiments are not to be considered essential features ofthose embodiments, unless the embodiment is inoperative without thoseelements.

Although the invention has been described in conjunction with specificembodiments thereof, it is evident that many alternatives, modificationsand variations will be apparent to those skilled in the art.Accordingly, it is intended to embrace all such alternatives,modifications and variations that fall within the spirit and broad scopeof the appended claims.

What is claimed is:
 1. A method for processing of particles in a fluidcomprising: (a) providing array of passageways fabricated on a diewherein the passageways comprise: a bottom layer; a top layer; and anactuators layer located therein between, the actuators layer furthercomprises passageway walls connected to actuators, wherein thepassageways sizes are controlled by the actuators which move thepassageway walls; (b) setting said actuators to narrow said passagewaysize by moving the passageway walls to a size in between a fully openpassageway size and a fully closed passageway size in order to performone of or any combination of (1) filtering of particles, (2) trapping ofparticles, or (3) catalyzing of particles reaction; and (c) stream saidfluid through said passageways.
 2. A method of claim 1, wherein saidarray of passageways is partitioned to groups wherein each group isacting in any given time as filter, traps, or catalyzer and thecombination between said actuators and said group of passageway are oneor more of said actuators are controlling single passageway or a singleactuator, alone or together with other actuators, shared plurality ofpassageways or any other many actuators to many passagewayscombinations.
 3. A method of claim 1, wherein said processing comprisesat least one of filtration of particles, sorting of particles, catalysisof particle reactions, clog prevention, particles alignment, particleorientation, energy insertion to particles, reagent insertion, inletsand outlets of fluids or any other fluid processing, wherein saidprocessing is performed using dynamically activating different groups ofactuators in time.
 4. A method of claim 1, wherein said passageway sizeis monitored and the actuators controlling the passageway size areactivated conditionally upon said passageway size monitoring.
 5. Amethod of claim 1, wherein said passageway size is set by said actuatorsto be less than said die minimal fabricated passageway size.
 6. A methodof claim 1, wherein said processing is multistage processing and theprocessing is performed using multiple arrays of passageway fabricatedon the same die and said fluid flows between stages of passagewayprocessing.
 7. A method of claim 4, wherein said monitoring is donebased on the capacitance measurement between pairs of said passagewaywalls or on the leakage current measurement between pairs of saidpassageway walls or on the amount of light or any electromagnetic signalwith different wavelength that pass thorough the passageway or on anyother measurable physical property that change its value with passagewaysize.
 8. A method of claim 1, wherein said actuators are MEMS actuatorsbased on electrostatic, electromagnetic or piezoelectric forces.
 9. Amethod of claim 1, wherein said die is multilayer die and the layers arefabricated using at least one of evaporation, photolithography andetching.
 10. A method of claim 1, wherein said passageways arefabricated in one or more layers of said die or fabricated across alllayers perpendicular to the plane of said die.
 11. A method of claim 1,wherein said processing comprises either particle alignment processingor particle orientation processing or both using the mean of (1)electric field, (2) magnetic field, (3) mechanical structures or (4)mechanical forces or any combination thereof.
 12. A method of claim 1,wherein said trapping particles by said passageways is performed bysetting the passageway size to enable partial entry of a target particleto said passageway or performed by reducing the passageway size when atarget particle is inside the passageway.
 13. A method of claim 1,wherein said processing comprises particle energy insertion and whereinthe energy supplied to said particle at least in the form of kineticenergy, electric energy, magnetic energy, electromagnetic energy, heatenergy or a combination of these.
 14. A method of claim 13, wherein saidactuators are delivering said kinetic energy to said particles.
 15. Amethod of claim 1, wherein said die comprises particles detectorslocated in said passageways or adjacent to said passageways inlet oroutlet.
 16. A method of claim 6, wherein said multistage processingcomprises a stage of trapping and a stage of catalyzing and wherein thestage of catalyzing is performed after a particle is being trapped. 17.A method of claim 6, wherein said multistage processing comprises astage of trapping of a biological particle or a cell or an organism anda stage of catalyzing that destroy or kill said biological particle orcell or organism.